Concept information
Preferred term
microelectromechanical device
Entry terms
- MEMS
- microelectromechanical system
In other languages
-
French
-
système microélectromécanique
-
German
-
mikroelektromechanisches System
-
Spanish
URI
http://data.loterre.fr/ark:/67375/FMC-DCB0SC8G-X
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