Concept information
Preferred term
mikro-Opto-Elektro-Mechanisches System
In other languages
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English
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Micro-opto-electro-mechanical device
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Micro-opto-electro-mechanical system
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Microoptoelectromechanical device
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Microoptoelectromechanical system
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MOEMS
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French
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Spanish
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sistema microelectromecánico
URI
http://data.loterre.fr/ark:/67375/FMC-J7CRM26H-4
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