Concept information
Preferred term
micro-opto-electro-mechanical system
Entry terms
- Micro-opto-electro-mechanical device
- Microoptoelectromechanical device
- Micro-opto-electro-mechanical system
- Microoptoelectromechanical system
- MOEMS
In other languages
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French
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German
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Spanish
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sistema microelectromecánico
URI
http://data.loterre.fr/ark:/67375/FMC-J7CRM26H-4
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