Concept information
Preferred term
Fotolithographie
Broader concept
Narrower concepts
Entry terms
- Photolithographie
In other languages
-
English
-
optical lithography
-
photolithographic process
-
French
-
lithographie optique
-
masquage optique
-
masquage photographique
-
photomasquage
-
Spanish
-
litografía óptica
URI
http://data.loterre.fr/ark:/67375/FMC-LJL82CDG-L
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