Concept information
Preferred term
Micro-Electrical-Mechanical Systems
Type
-
mesh:Descriptor
Definition
- A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps. MEMS designed specifically to interact with biological samples.
Broader concept
Narrower concepts
Entry terms
- MEMS
- Micro-Electro-Mechanical Systems
Allowable Qualifier(s)
In other languages
-
French
-
SMEM
-
Systèmes micro-électromécaniques
-
Systèmes microélectromécaniques
URI
http://data.loterre.fr/ark:/67375/JVR-XVGRCFVP-7
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