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Concept information

Natural Science Disciplines > Microtechnology
Technology, Industry, and Agriculture > Technology > Miniaturization > Microtechnology

Terme préférentiel

Microtechnology  

Type

  • mesh:Descriptor

Définition

  • Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS. The process usually involves replication and parallel fabrication of hundreds or millions of identical structures using various thin film deposition techniques and carried out in environmentally-controlled clean rooms.

Concept générique

Concepts spécifiques

Synonyme(s)

  • Microfabrication
  • Micromachining
  • Micromanufacturing

Qualificatif(s) autorisé(s)

Traductions

  • Microtechnologie

    français

  • Micro-fabrication
  • Micro-technologie
  • Micro-usinage
  • Microfabrication

URI

http://data.loterre.fr/ark:/67375/JVR-K2X36P79-4

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RDF/XML TURTLE JSON-LD Date de création 08/07/2008, dernière modification le 16/10/2008