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Concept information

Technology, Industry, and Agriculture > Manufactured Materials > Micro-Electrical-Mechanical Systems
Equipment and Supplies > Electrical Equipment and Supplies > Micro-Electrical-Mechanical Systems

Terme préférentiel

Micro-Electrical-Mechanical Systems  

Type

  • mesh:Descriptor

Définition

  • A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps. MEMS designed specifically to interact with biological samples.

Concept générique

Concepts spécifiques

Synonyme(s)

  • MEMS
  • Micro-Electro-Mechanical Systems

Qualificatif(s) autorisé(s)

Traductions

URI

http://data.loterre.fr/ark:/67375/JVR-XVGRCFVP-7

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RDF/XML TURTLE JSON-LD Date de création 08/07/2008