... > chemical entity > molecular entity > main group molecular entity > p-block molecular entity > pnictogen molecular entity > nitrogen molecular entity > N-silyl compound > hexamethyldisilazane

... > chemical entity > molecular entity > main group molecular entity > p-block molecular entity > carbon group molecular entity > organic molecular entity > organosilicon compound > N-silyl compound > hexamethyldisilazane

... > chemical entity > molecular entity > main group molecular entity > p-block molecular entity > carbon group molecular entity > silicon molecular entity > organosilicon compound > N-silyl compound > hexamethyldisilazane