Concept information
Preferred term
deposición por haz de electrones
Entry terms
- deposición inducida por haz de electrones
Belongs to group
- Design (en)
In other languages
-
English
-
electron-beam induced deposition
-
French
-
dépôt induit par faisceau électronique
URI
http://data.loterre.fr/ark:/67375/NHT-RVLXVKKM-S
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