Concept information
Preferred term
micro-opto-electromechanical device
Entry terms
- microoptoelectromechanical device
Belongs to group
In other languages
-
French
-
dispositif microoptoélectromécanique
-
microsystème opto-électromécanique
-
Spanish
URI
http://data.loterre.fr/ark:/67375/RDR-RZWJNFP8-H
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