Concept information
Preferred term
litografía por haz de electrónes
Broader concept
Belongs to group
- Design (en)
In other languages
-
English
-
French
-
lithographie par faisceau électronique
-
masquage électronique
URI
http://data.loterre.fr/ark:/67375/RDR-P1KD9GNK-K
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