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Inorganic compounds (thesaurus)

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inorganic compound > halogen compound > halides > silicon halide > silicon fluoride
inorganic compound > silicon compound > silicon halide > silicon fluoride
inorganic compound > halogen compound > fluorine compound > fluorides > silicon fluoride
inorganic compound > silicon compound > silicon fluoride

Preferred term

silicon fluoride  

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http://data.loterre.fr/ark:/67375/RVQ-RK2CQ0W5-V

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